JPH0143869Y2 - - Google Patents

Info

Publication number
JPH0143869Y2
JPH0143869Y2 JP16972683U JP16972683U JPH0143869Y2 JP H0143869 Y2 JPH0143869 Y2 JP H0143869Y2 JP 16972683 U JP16972683 U JP 16972683U JP 16972683 U JP16972683 U JP 16972683U JP H0143869 Y2 JPH0143869 Y2 JP H0143869Y2
Authority
JP
Japan
Prior art keywords
tape
wafer
adhesive tape
cut
lower guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16972683U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6078136U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16972683U priority Critical patent/JPS6078136U/ja
Publication of JPS6078136U publication Critical patent/JPS6078136U/ja
Application granted granted Critical
Publication of JPH0143869Y2 publication Critical patent/JPH0143869Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP16972683U 1983-10-31 1983-10-31 半導体製造装置 Granted JPS6078136U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16972683U JPS6078136U (ja) 1983-10-31 1983-10-31 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16972683U JPS6078136U (ja) 1983-10-31 1983-10-31 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS6078136U JPS6078136U (ja) 1985-05-31
JPH0143869Y2 true JPH0143869Y2 (en]) 1989-12-19

Family

ID=30370724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16972683U Granted JPS6078136U (ja) 1983-10-31 1983-10-31 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS6078136U (en])

Also Published As

Publication number Publication date
JPS6078136U (ja) 1985-05-31

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